HPL-2011-32 Fabrication of Three-Dimensional Imprint Lithography Templates by Colloidal Dispersions - Almanza-Workman, A. Marcia; Carl, Taussig P.; Jeans, Albert H.; Cobene, Robert L.
Keyword(s): Flexible displays, Self aligned imprint lithography, stamps, fluorothermoplastics, latex
Abstract: Self-aligned imprint lithography (SAIL) enables patterning and alignment of submicron-sized features on flexible substrates in the roll-to roll (R2R) environment. Soft molds made of elastomers have been used as stamps to pattern three-dimensional masks. Durability of these stamps is one factor that ...
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